(WO/2003/019168) METAL OXIDE SEMICONDUCTOR GAS SENSOR
- Biblio. Data
- Description
- Claims
- National Phase
- Notices
- Documents
| Latest bibliographic data on file with the International Bureau
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| IPC: | G01N 27/12 (2006.01) | ||||||||||||||||||
| Applicants: | UCHIYA THERMOSTAT CO., LTD. [JP/JP]; 2-176-1, Takasu, Misato-shi, Saitama 341-0037 (JP) (All Except US). KATSUBE, Teruaki [JP/JP]; (JP) (US Only). ONOUE, Kousei [JP/JP]; (JP) (US Only). | ||||||||||||||||||
| Inventors: | KATSUBE, Teruaki; (JP). ONOUE, Kousei; (JP). | ||||||||||||||||||
| Agent: | OSUGA, Yoshiyuki; 3rd Fl., Nibancho Bldg., 8-20, Nibancho, Chiyoda-ku, Tokyo 102-0084 (JP). | ||||||||||||||||||
| Priority Data: |
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| Title: | METAL OXIDE SEMICONDUCTOR GAS SENSOR | ||||||||||||||||||
| Abstract: | A metal oxide semiconductor gas sensor and a method of manufacturing the gas sensor, the gas sensor comprising a guided plasma thermal spraying device (20) formed of a depressurizing tank (21) having an electrode (15) formed on a substrate (10) and incorporating an insulation board (22) for placing the substrate thereon and a plasma torch (24) connected to the depressurizing tank and having a powder leading probe (26) and a high frequency coil (25), the method comprising the steps of, by using the guided plasma thermal spraying device (20), placing the substrate on the insulation board, setting a clearance between the substrate side tip of the powder leading probe and the substrate to 1000 mm or shorter, depressurizing the depressurizing tank, supplying metal oxide powder from the powder leading probe while generating high frequency guided plasma from the high frequency coil, and depositing, on the surface of the substrate, the metal oxide formed of a large grain part with large gain sizes and a large number of small grain parts formed on the peripheral surface of the large grain part. | ||||||||||||||||||
| Designated States: |
US. European Patent Office (EPO) (DE, GB). | ||||||||||||||||||
| Publication Language: | Japanese (JA) |
| Filing Language: | Japanese (JA) |
