This class covers micro-structural devices or systems, including at least one essential element or formation characterised by its very small size, typically within the range of 10-4 to 10-7 meters, i.e. its significant features can not, in at least one dimension, be completely discerned without the use of an optical microscope. [7]
In this class, the following expressions are used with the meaning indicated: [7]
"micro-structural devices" covers: [7]
micro-mechanical devices comprising movable, flexible or deformable elements; and [7]
three-dimensional structures without movable, flexible or deformable elements, comprising microformations designed to accomplish an essential structural function for interacting with their environment, as opposed to purely electronic or chemical functions, regardless of whether the structures are combined with micro-electronic devices or formed from specific materials; [7]
"micro-structural systems" covers: [7]
systems of cooperating micro-structural devices; and [7]
micro-electro-mechanical or micro-opto-mechanical systems, which combine on a common substrate the specific features of micro-structural devices and electrical or optical components, e.g. for controlling, analysing or signalling the functioning of micro-structural devices. [7]
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons Fulltext... Hierarchy... Expanded...B01J 13/02; processes or apparatus peculiar to the manufacture or treatment of piezo-electric, electrostrictive or magnetostrictive elements per seFulltext... Hierarchy... Expanded...H01L 41/22) [7]
B81C
Note(s)
This subclass does not cover: [7]
processes or apparatus for the manufacture or treatment of purely electrical or electronic devices, which are covered by section H, e.g. group Fulltext... Hierarchy... Expanded...H01L 21/00; [7]