IPC Definitions - January 01, 2012
G03F 1/80 - Definition
This group covers:
Subject matter of subgroup G03F 1/68 in which the processes for preparing patterned radiation modifying products include an etching step to selectively remove material from a mask or a mask blank.
Attention is drawn to the following places, which may be of interest for search:
Etching metallic material by chemical means | C23F 1/00 |