IPC Definitions - January 01, 2012
G03F 1/60 - Definition
This group covers:
Subject matter of main group G03F 1/00 in which the radiation modifying products or similar products have a substrate defined by a particular material, a given structure, or a stated property, making the substrate especially suited (e.g., in a patterned mask, in a mask blank therefor) for use in radiation imaging.
Attention is drawn to the following places, which may be of interest for search:
Layered products characterized by the non-homogeneity or physical structure of a layer | B32B 5/00 |