IPC Definitions - January 01, 2012

G03F 1/64 - Definition fr

Definition statement

This group covers:

Subject matter of subgroup G03F 1/62 in which the pellicles have special frames (e.g. structure or material), including bonding means for the pellicle frame, which establishes a bond between the frame and a pellicle membrane or between a frame and a substrate of a radiation modifying product.

Note. In this subgroup, the bonding means often includes an adhesive layer. Alternatively, the bonding means can include a structure that provides a physical attachment.