IPC Definitions - January 01, 2012
H01L 21/00 - Definition
References relevant to classification in this main group
This main group does not cover:
Processes or apparatus specially adapted for the manufacture or treatment of devices provided for in groups H01L 31/00-H01L 51/00 or of parts thereof, see these groups | H01L 31/00-H01L 51/00 |
Attention is drawn to the following places, which may be of interest for search:
Single-step processes covered by other subclasses, see the relevant subclasses, e.g. | C23C, C30B |
Photomechanical production of textured or patterned surfaces, materials or originals therefor, apparatus specially adapted therefor, in general | G03F |