IPC Definitions - January 01, 2012
G03F 1/52 - Definition
This group covers:
Subject matter of main group G03F 1/00 in which the radiation modifying products have a reflector that functions as a mirror to deflect incident radiation.
Note. The reflector can be a particular material that is chemically defined. Alternatively, the specified reflector can have a specific shape, a particular thickness, or a given internal microstructure (such as a reflector that was subjected to a particular heat treatment to relieve internal stress).