IPC Definitions - January 01, 2012
G03F 1/28 - Definition
This group covers:
Subject matter of subgroup G03F 1/26 in which the phase shift mask (PSM) has three (3) or more different transmissive or reflective portions thereon that provide three (3) or more diverse phases of exiting illumination (e.g., tri-tone PSM for 0°, 90°, and 180° phases); and in which the process of preparing is directed to preparation of such a patterned PSM.