IPC Definitions - January 01, 2012
G01Q 70/04 - Definition
This group covers:
General SPM probe holders with integrated means to adjust the probe to correct for errors caused by temperature variations or vibrations.
Attention is drawn to the following places, which may be of interest for search:
Error compensation in general | G01Q 30/06 |
Protection of the scanning probe microscope in general | G01Q 30/18 |