IPC Definitions - January 01, 2012
G03F 1/38 - Definition
This group covers:
Subject matter of main group G03F 1/00 in which the patterned radiation modifying products are masks having auxiliary features, where the mask possesses some structure in addition to that used for imaging and this structure is used for subsidiary purposes; and in which the processes of preparing are directed to preparation of such masks having auxiliary features.
Note. For example, the subsidiary purposes may be for alignment of the mask within an exposure apparatus, for testing of the mask, for protecting the mask, or for improving an image obtained from the mask.