IPC Definitions - January 01, 2012

G03F 1/80 - Definition fr

Definition statement

This group covers:

Subject matter of subgroup G03F 1/68 in which the processes for preparing patterned radiation modifying products include an etching step to selectively remove material from a mask or a mask blank.

Informative references

Attention is drawn to the following places, which may be of interest for search:

Etching metallic material by chemical means

C23F 1/00